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Subject: Re: More info please?
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Date: 07/09/02 at 11:52 PM
Posted by: Garry Williams
In Reply to: More info please? posted by charlie on 07/09/02 at 11:13 AM:
How tall is your chamber? Do you have any fixturing in it at the present time? Most of the "flip" tooling is done on a modified cosign of 3 to 6 "pie" shapped slices that can be fitted with "insert" fixtering to hold your substrates in place from the top. Most fixturing then locks inplace onto the tooling that rotates during the deposition. A lifting "finger" is welded into place on the fixturing which is able to rotate be pins, and a rotating flipper is installed to "flip" them and is rotated from outside the chamber. It requires tooling to be make to fit inside the chamber which can be expensive.There are tricks to make it all work as planned.
Reply charlie Posted at: 07/10/02
Re: Reply Garry Williams Posted at: 07/20/02
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