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Date: 08/14/00 at 1:07 AM
Posted by: Rainer
E-mail: Lebert@ilt.fhg.de

In Reply to: Re: Equivalent size of materials? posted by Mike Gray on 03/24/00 at 2:55 PM:

For calcualtions you best check

http://www-cxro.lbl.gov/optical_constants/

http://www-cxro.lbl.gov/optical_constants/atten2.html

I am curios about your metrology task. Please tell me more about your problem .
Perhaps I can discuss some solutions with you.

What material do you want to detect
What is the typical enviroment ? At the surface of Silicon , Resist ? Burried in .... ?
What is the typical size you have difficulty to detect ?
Is there an urgent industrial need ?
What would customers pay for solutions ? in-line, on-line, off-line ?

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