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Subject: developing photoresist problems
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Date: 06/07/00 at 12:59 AM
Posted by: Adam Seychell
E-mail: aseychell@vet.com.au
Message Posted:
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Hi all, I have a question about developing photoresists (negative dry
film types) that I hope someone who's had experience using photoresist can help me. The problem I am having is an invisible residue (scum) left behind on the copper surface after the developing process. This thin film is resistant to the electro plating process that follows. From what I understand scum is normally removed by copper etching but if thick enough it will resists etching as well. Electroplating requires all traces of scum to be removed since there is no self cleaning action like there is with etching. After development the amount of scumming that remains is enough to resists etching. I therefore cannot even do a pre etching to remove the residue in order to expose 100% of the copper. Development is done in 1% sodium carbonate at 25C in bubble agitated tank. After about 3 minutes all visible signs of unexposed resists are removed and shiny copper can be seen. At this point I place the board in a tray of fresh water (room temp) and wipe over with soft cotton balls. With this method the scum is still remaining, especially in narrow crevices (< 6 mils). If I rub harder the scum is eventualy removed but this also damages fine traces. The scum needs to be removed some other way. Do I need to increase developing time, say to double or 6 minutes ? If left in developer for too long I notice the edges of the photoresists start to swell and fine lines become very fragile, but this returns to normal strength when rinsed down or placed in acid/etcher.
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