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Subject: SnO2 coating using RF sputtering device.

Date: 10/17/02 at 2:43 PM
Posted by: Rajesh Subbiah
E-mail: rajesh-subbiah@utulsa.edu
Message Posted:

Does anybody uses a RF sputterer(208 hr,pb-3 RF power system)for sputtering ceramic targets.We ve been using this sputter coater for sputtering metal targets.But we are not able to use it for sputtering ceramic targets like SnO2.Please give me your suggestions.Does anybody have any idea about this problem.
Rajesh Subbiah.

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