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Subject: Re: Power loss in sputtering

Date: 03/17/03 at 5:43 AM
Posted by: Uwe Krause
E-mail: dl6mpg@spamcop.net
Message Posted:

In Reply to: Power loss in sputtering posted by Sarfaraz Moh on 02/11/03 at 7:10 AM:


if you are using current control, the Power input is a function of the Plasma impedance, and if you are using the same parameters the plasme impedance should be also the same. So look for the parameter which is different (maybe pressure, pumping speed etc.).

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