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Subject: Need help on surplus ion charge compensation
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Date: 03/05/03 at 3:06 AM
Posted by: Taras Lisouski
I am seeking you support in the following:
1. We work on compensation of the surplus ion charge during ion beam sputtering, and we look for the non-fillament (without hot cathode) solution. Can anyone recomend apropriate methodes, devices and materials for this?
2. Is it possible to introduce a microwave magnetron head directly into the vacuum chamber?
Thank you in advance for comments.
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