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Subject: Comparison between CF4 and SF6 plasma etch

Date: 10/26/03 at 1:30 AM
Posted by: Jason
E-mail: jason_class@yahoo.com
Message Posted:

Hi All Experts,

May I know the differences or comparison between CF4 and SF6 plasma etch?
I would like to know about the physics and application for that two plasma etch. Also May I know which is better? Any documents or website online for reference?
Thank you

regards and thanks
Jason


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