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Subject: MBE's power refelection is too large

Date: 10/20/03 at 3:07 PM
Posted by: frank
E-mail: tankertanker2004@yahoo.com
Message Posted:

Hi

We are depositing AlN with MBE. But the power reflection of source is too large and the plasma is smaller and smaller during depostion.

What's wrong with it?
How to check it and correct it?

Thanks,

Frank


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