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Subject: Re: Silver E-beam evaporation

Date: 10/16/03 at 10:41 AM
Posted by: Carlo Colalillo
E-mail: carlo@iamaterials.com
Message Posted:

In Reply to: Silver E-beam evaporation posted by Gord Wang on 10/02/03 at 12:37 PM:


You are seeing carbon contamination. This can be fixed by using a thermodynamic molybdenum liner. The moly will not contaminate and the thermodynamic liner design will give you the thermal isolation needed. We manufacture these liners as well.


Carlo Colalillo

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