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Subject: Re: Gold or Aluminum evaporation -- Splatters(Spitting) Problem

Date: 10/14/03 at 7:48 AM
Posted by: Thank you for your advice
E-mail: gwang@ofc.com
Message Posted:

In Reply to: Gold or Aluminum evaporation -- Splatters(Spitting) Problem posted by Gord on 10/07/03 at 1:08 PM:

Thanks a lot for your advice. It's really highly appreciated.We use both thermal evaporation (no W wire is used for heating, but Boron nitride or Mo boat) and E-beam (with liners)for deposition.Besides material and heating control, is there any other way such as the physical setup to prevent splatter (if it happens) from going directly to the substrate? I remember I have seen some reports referred to a special crucible to eliminate the splatter and some other ideas. Unfortunately there have no details.Gord

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