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Subject: Gold or Aluminum evaporation -- Splatters(Spitting) Problem

Date: 10/07/03 at 1:08 PM
Posted by: Gord
E-mail: wangg7281@yahoo.com
Message Posted:

We occasionally have the problem of gold or Al splaater issues when we deposit metal thin films. What are the most important ways to control this issue?

Your comment is appreciated.


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