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Subject: Gold or Aluminum evaporation -- Splatters(Spitting) Problem

Date: 10/07/03 at 1:08 PM
Posted by: Gord
E-mail: wangg7281@yahoo.com
Message Posted:

We occasionally have the problem of gold or Al splaater issues when we deposit metal thin films. What are the most important ways to control this issue?

Your comment is appreciated.

Gord


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