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Subject: Power loss in sputtering
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Date: 02/11/03 at 7:10 AM
Posted by: Sarfaraz Moh
Dear All We have a problem with a sputtering unit, we did a process a year ago and we wanted to repeat it again but we have found that the power is reduced, It is controlled by current and the target was Aluminium. With all the gas flows and other parameters remaining the same. Can any one explain what must have happened to the lost power.
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