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Subject: Power loss in sputtering

Date: 02/11/03 at 7:10 AM
Posted by: Sarfaraz Moh
E-mail: sarfarazmoh@yahoo.com
Message Posted:

Dear All We have a problem with a sputtering unit, we did a process a year ago and we wanted to repeat it again but we have found that the power is reduced, It is controlled by current and the target was Aluminium. With all the gas flows and other parameters remaining the same. Can any one explain what must have happened to the lost power.

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