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Subject: sputter deposition of materials on different wafers

Date: 07/30/03 at 6:21 PM
Posted by: Abhiram Govindaraju
E-mail: abhiram@mal.eng.sunysb.edu
Message Posted:

hi all, could one of you let me know if the deposition of aluminum on a wafer by dc sputtering varies if the wafer is an insulator/conductor.
i know that the adhesion properties of the wafer play a vital role in this particular situation.but if we consider dc sputtering and if the silicon wafer is replaced by a glass wafer,does the thickness on the glass varies with that of the silicon for the same set of properties.

could one of you refer me to any technical papers regarding the same and explain me if that is true.

thanking you.

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