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Subject: Sputter Port Cooling wells
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Date: 07/25/03 at 8:46 PM
Posted by: zephra
Our system has water cooled ports in the sputter port.This port is removable. We use copper masks which our plastic substrate tends to stick to occasionally.Would watercooling the sputter port help with sticking to the mask issues?I am mainly concerned of the effects on the process by water cooling the sputter port.Target is currently water cooled 52F.
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