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Subject: Re: aluminum sputtering using cvc 601
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Date: 07/15/03 at 10:12 AM
Posted by: Rob Belan
In Reply to: aluminum sputtering using cvc 601 posted by Abhiram Govindaraju on 07/09/03 at 1:18 PM:
Sounds like the pressure is a bit low. Your gauge might be measuring 1.6mTorr but the sputering gun may be seing a lower pressure. This would be a mechanical gas flow type of problem. Also, there is a unique operations curve for most sputtering guns. To a large degree they follow Paschen's law. Lower pressures lead to operational instability.
The lions share of Al sputtering takes place around 3-5mTorr. If it is an option, increase pressure to around 5mTorr.
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