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Subject: Re: Indium/Tin target
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Date: 07/08/03 at 4:07 PM
Posted by: John Fenn
In Reply to: Re: Indium/Tin target posted by Vladimir ® on 05/02/03 at 4:05 PM:
Remelting of In/Sn targets is a standard procedure in the ITO roll coating business. The catodes are heated by flat bed heaters. There are several items that must be considered. First it is important to make sure that the temperature profile of the cathode is well controlled. Secondly, the cooling must be slow. If not, you will get domains of different crystals. Finally, the copper from the backing plates can contaiminate the In/Sn alloy. It takes very little copper to affect the Rs of the ITO, ppm levels. The more copper contaiminant you have, the higher the final Rs of the ITO coating. A nickel plating over the copper is the best approach. If you have sputtered down to the copper backing plate, you will eventually contaiminate the alloy.
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