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Subject: Question on dopant profile of 0.35micron, 0.25micron,0.13micron CMOS
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Date: 07/03/03 at 2:47 PM
Posted by: Kavin
Could you anyone tell me what is the meaning of 0.35 micron, 0.25 micron, and 0.13 micron? It means that the implantation and annealing parameters are fixed on certain values for certain technologies, therefore the dopant depth profiles (e.g. SIMS and SRP) are fixed for each technology?
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