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Subject: Dry etching for HfO2 (20~30nm)?

Date: 06/27/03 at 12:14 PM
Posted by: changhwan
E-mail: chchoi@mail.utexas.edu
Message Posted:

Any body konw which gas is used for removing HfO2 (20~30nm thickness) using dry etching?
If know, could you let me know the recipe?

Thanks.


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