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Subject: Re: SiO2 deposition

Date: 05/21/03 at 5:34 AM
Posted by: Maciej Wojdak
E-mail: mwojdak@phys.uva.nl
Message Posted:

In Reply to: Re: SiO2 deposition posted by Vasco Teixeira on 05/20/03 at 7:28 PM:

Dear Vasco,

Thank you for your answer.
I dont have experience with reactive sputtering.
My system is RF sputtering and I have SiO2 target (and also Si-target).

I hope that I can make thick layer of SiO2 by long sputtering process with SiO2 target.
But I don't know if the layer will be robust enough to be used as a target (for short sputtering).
This I'm going to try.

Regards,

Maciej


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