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Subject: SiO2 deposition
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Date: 05/16/03 at 6:33 AM
Posted by: Maciej Wojdak
I make SiO2 or Si layers by sputtering.
I was looking for quartz or fused quartz substrates, does anybody know
where can I buy them at competitive price?
Other question is deposition of SiO2 on Cu.
The idea is to deposit ~50 micrometer layer of SiO2 on copper plate, and use it later
as a SiO2 target for very short processes.
Maybe somebody already have some (bad or good) experience with this method?
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