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Subject: Re: varying the distance between the target material and the substrate holder

Date: 05/02/03 at 4:50 PM
Posted by: Vladimir
E-mail: nomail@nomail.com
Message Posted:

In Reply to: varying the distance between the target material and the substrate holder posted by Abhiram Govindaraju on 04/30/03 at 2:58 PM:

I know at least two methods:
(i) To move the target away off the substrate.
(ii) To move the substrate away off the target.

If you find another way, please let me know.


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