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Subject: Re: Power loss in sputtering

Date: 04/28/03 at 6:44 AM
Posted by: Mark Jarratt
E-mail: jarrattmark@hotmail.com
Message Posted:

In Reply to: Power loss in sputtering posted by Sarfaraz Moh on 02/11/03 at 7:10 AM:

I believe the problem is due to target erosion. As you wear the target away the surface becomes nearer to the magnets behind the target. Consequently the target voltage decreases and therefore so does the target power and the deposition rate.

If you wish to control using the target current you must increase the deposition time. Hope this is helpful.

P.S. I have designed a website giving the basics of PVD coatings, www.pvd-coatings.co.uk. Any comments would be appreciated.

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