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Subject: Re: oxygen in a-SiC
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Date: 04/24/03 at 10:12 PM
Posted by: Vladimir ®
In Reply to: oxygen in a-SiC posted by Andrey Vasin on 04/10/03 at 7:58 AM:
The first thing I would suggest is that your gas lines are leaking. Open all the valves in your gas lines and mass-flow controllers (high-pressure valves on the gas cylinders are closed). The pressure should be at least 10-5 Torr.
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