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Subject: regenerating a cryo pump

Date: 04/14/03 at 3:45 PM
Posted by: Abhiram Govindaraju
E-mail: abhiram@mal.eng.sunysb.edu
Message Posted:

hi all, could some one give me the detailed procedure to regenerate a cryogenic compressor.the sputtering system that we have here is cvc 601.

thanking you.
regards
abhiram.


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