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Subject: Rectangular Planar Magnetrons.....

Date: 04/07/03 at 7:18 AM
Posted by: Sculli
E-mail: paul.scullion@pilkington.com
Message Posted:


Being an engineer, I have only a basic understanding of PVD physics, but here goes.....

Having successfully completely overhauled and upgraded the control system on a large vacuum coating chamber, I have been tasked with increasing the coating ability of the system. We currently have a single rectangular planar magnetron (34" length) and are looking to add a second to be able to deposit multi-layer coatings. I understand that there may also be a possibility of changing the magnetic array on the existing magnetron to match any new unit.

Can anybody suggest potential suplliers of such complete magnetron systems who may be able to offer some much-needed advice.

Thanks in anticipation.....


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