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Subject: Re: Ad. ignition and stability of plasma (PE 2400)

Date: 07/11/02 at 10:11 PM
Posted by: Pat McMahon
E-mail: film.vac@verizon.net
Message Posted:

In Reply to: Ad. ignition and stability of plasma (PE 2400) posted by Maciej Wojdak on 07/11/02 at 6:26 AM:

Maciej,

The tuning circuit and power supply are probably fine.

Cleaning the dark shields is a good idea as they are probably contaminated and will give you problems later on.

After you have your system working right, pre-sputter your targets for 10 - 15 minutes to clean them up.

SiO2 targets will not contaminate your system of themselves as the O2 is highly bonded to the Si and will not come off atomically. If they have been sputtered in the presense of water vapor they can deposit low density films with included water which will give you problems later. Cleaning the dark space shields will prevent problems later on.

Your partial pressure meter is showing you where the problem is. Check those water seals.

I think you know what to do. Good luck.

Pat


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