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Subject: need help with ignition and stability of plasma (Perkin-Elmer 2400)

Date: 07/10/02 at 10:21 AM
Posted by: Maciej Wojdak
E-mail: mwojdak@phys.uva.nl
Message Posted:

Dear All,
I instaled new Si-target in my sputtering system.
After ~20 calibration runs with power 50-200W the target started arcing.
After this happend, it became difficult to keep stable plasma.
So, when I turn power knob, there is no ignition for long range, and above some treshold ignition appears,
but the forward RF power is above 600W and can not be smaller.
If I try to minimize forwrad power the ignition disappears.

During ignition, the matching circuit can be tuned, to keep reflected power almost zero.
Also Ar presure can be varied from few 10-3mbar to 1x10-2mbar (adjusting tuning)
So the problem is not pressure nor tuning.

Can you give me any advice how to handle this problem.

Best regards,
Maciej Wojdak


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