| Home | Terms of Use | Site Map | Contact Us |
IndustryCommunity.com > Manufacturing Community > Forum of High Vacuum Technology/Processing/Coating > Message
Main Menu
Find

[ List Subjects ][ Current Board ][ Post Message ]
[ View Followups ][ Post Followup ]

Subject: sputt. target - bonded or screwed?

Date: 07/04/02 at 11:05 AM
Posted by: Maciej Wojdak
E-mail: mwojdak@science.uva.nl
Message Posted:

Dear All,

I have Perkin Elmer 2400 with 8" targets.
Actually, I use smaller targets (3"), with appropriate dark shields.

My problem is:
I want to use more small targets, but I don't have too many 8" backing plates.
So the idea is: to bond small target on the 6" copper plate (2mm thick), and fix this copper plate to 8" backing plate with screws.
I can have many targets bonded on these 6" copper plates.
This would also allow to change targets quickly, without removing backing plate from the bell-jar, water installations, and so on.

Did anybody try to do something like this?
Please tell me, if you know anything against this idea.
I know that thermal contact with backing plate may be not so good with screws, but maybe there are more reasons?

Best regards,
Maciej Wojdak


Follow Ups:


Post a Follow-up:

Name:
E-Mail:
Subject:

Message to Post:

 

Click here:
1999-2001 Sunlit Technology Co., Ltd. All rights reserved.