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Subject: Re: Backflow of diffusing pump oil into vaccuum deposition chamber

Date: 06/19/02 at 11:35 AM
Posted by: Donald Mattox
E-mail: donmattox@svc.org
Message Posted:

In Reply to: Re: Backflow of diffusing pump oil into vaccuum deposition chamber posted by Garry Williams on 06/17/02 at 2:49 AM:

Make sure that the heater temperature is correct for the oil being used. If hydrocarbon oil is put into a diffusion pump set up for silicone oil the sump temperature will be too hot. Don Mattox


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