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Subject: small orifice plasma loss

Date: 06/19/02 at 8:38 AM
Posted by: Robert L Gillooly
E-mail: bgillooly@atriummed.com
Message Posted:

I am tring to understsnd why I loose a plasma formation in a small diameter orifice. I have a glass tube reactor with a substrate holder at the center region, this holder isolates or seals the reactor so the gas has to pass through four small orifice passages. When 13.56 MHz @ 50 watts is applied all four passages will flash a plasma, then it disappears. I will have a plasma cloud on both sides of the holder, but not through the small orifice openings.
Each time I toggle the RF power off/on the plasma will flash through the holes consistantly, but will not sustain.

Thank you
Bob G

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