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Subject: Re: ion current -vs- rate

Date: 06/18/02 at 8:44 PM
Posted by: Donald Mattox
E-mail: donmattox@svc.org
Message Posted:

In Reply to: ion current -vs- rate posted by jim moore on 06/17/02 at 1:51 PM:

There is not much or any ionization in resistive- heating thermal evaporation but there is in e-beam evaporation. Collecting the ions can be used for rate control. There are commercial ioniztion rate controllers. See Graper J.V.S.T. 8, 333 (19710. Don Mattox


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