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Subject: check your resist profile

Date: 10/19/03 at 9:09 PM
Posted by: zhengwf
E-mail: zhengwf03@hotmail.com
Message Posted:

In Reply to: Evaporated Gold doesn't lift from Substrate, please advise. posted by Michael Buschmann on 01/07/03 at 4:18 PM:

if you are using negative for liftoff, it is very important to have sufficient undercut of resist pattern. Also, the height of resist vs. the thickness of metal. A lift-off dome is prefered to have poor stepcourage, although we have done such process on both dome and planet.

Hope this can help


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