[ List Subjects ][ Current Board ][ Post Message ]
Subject: Re: Backflow of diffusing pump oil into vaccuum deposition chamber
[ View Followups ][ Post Followup ]
Date: 06/17/02 at 2:54 PM
Posted by: dan feigenbaum
In Reply to: Re: Backflow of diffusing pump oil into vaccuum deposition chamber posted by Pat McMahon on 06/12/02 at 10:13 PM:
It should also be noted that crossing over from the roughing mode to the hi vac mode if done BELOW 75 Millitorr will cause a backflow of diffusion pump oil vapor.particularly if the DP has either inadequate cooling or the wrong type oil for the heater.
Post a Follow-up: