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Subject: Re: Backflow of diffusing pump oil into vaccuum deposition chamber

Date: 06/17/02 at 2:54 PM
Posted by: dan feigenbaum
E-mail: dan@fnol.net
Message Posted:

In Reply to: Re: Backflow of diffusing pump oil into vaccuum deposition chamber posted by Pat McMahon on 06/12/02 at 10:13 PM:

It should also be noted that crossing over from the roughing mode to the hi vac mode if done BELOW 75 Millitorr will cause a backflow of diffusion pump oil vapor.particularly if the DP has either inadequate cooling or the wrong type oil for the heater.


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