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Subject: Re: plasma assisted evaporation
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Date: 06/21/03 at 3:51 PM
Posted by: Grytsenko
In Reply to: plasma assisted evaporation posted by YC Zhang on 09/10/02 at 5:50 AM:
e-beam evaporation allows use of RF plasma at high vacuum without Ar or other gas.
Plasma power and results dependent strongly of material to be deposited.
In general, more adgesion and smoothness you can reach using plasma at the beginning of process only.
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