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Subject: Re: Backflow of diffusing pump oil into vaccuum deposition chamber
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Date: 06/17/02 at 2:49 AM
Posted by: Garry Williams
In Reply to: Backflow of diffusing pump oil into vaccuum deposition chamber posted by C.S.Lee on 06/12/02 at 4:20 AM:
You did not mention if you have a water or LN2 cooled optical cheveron in-between the the DP and chamber, also to high of a coating temp. can cause this problem as well.
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