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Subject: Re: Backflow of diffusing pump oil into vaccuum deposition chamber

Date: 06/17/02 at 2:49 AM
Posted by: Garry Williams
E-mail: garry_will@msn.com
Message Posted:

In Reply to: Backflow of diffusing pump oil into vaccuum deposition chamber posted by C.S.Lee on 06/12/02 at 4:20 AM:

You did not mention if you have a water or LN2 cooled optical cheveron in-between the the DP and chamber, also to high of a coating temp. can cause this problem as well.


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