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Subject: Re: Problem to sputter TiN for aluminum alloy substrate

Date: 01/07/03 at 3:19 PM
Posted by: Donald Mattox
E-mail: donmattox@svc.org
Message Posted:

In Reply to: Problem to sputter TiN for aluminum alloy substrate posted by Amy Smith on 01/01/03 at 6:38 AM:

Your problem is that there is surface charge buildup on the aluminum oxide on the aluminum surface hwn bombarded. This charge buidup gives surface flashover (arcing). You can avoid the problem by using a mid-frequency pulsed power supply for the bias or by sputter cleaning the oxide from the aluminum surface before deposition. You do not see the problem with stainless steel because the chromium oxide on the surface is electrically conductive. Don Mattox

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