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Subject: high vacuum and leak rate; getters
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Date: 12/29/02 at 3:24 PM
Posted by: George Grzybowski
I am new to the industry and in the process of establishing an enterprize requiring routine re-evacuation of items to less than 10 microns, using a rotary vane pump and Inficon UL200. What is an acceptable leak rate, how stable should the readings be and over what time period should this rate be monitored with only the UL200 being used for this final determination? Also, what amount of getter/volume is usally required to achieve optimal effectiveness ? I have available a zeolyte product, if memory serves me correct. Any feedback would be appreciated.
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