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Subject: Loading/unloading tooling

Date: 12/19/02 at 1:44 PM
Posted by: Vladimir Tchoutko
E-mail: info@vecorus.com
Message Posted:

Dear all,

I'm looking for manufacturer(s) of tooling to load/unload the Si wafers (Dia.6" x 300 um) into/out of vacuum chamber through the vacuum gate. Any information is very appreciated!

Thanks.


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