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Subject: Re: cvc 601 sputtering machine

Date: 12/09/02 at 2:45 PM
Posted by: Donald Mattox
E-mail: donmattox@svc.org
Message Posted:

In Reply to: cvc 601 sputtering machine posted by Abhiram Govindaraju on 12/08/02 at 7:39 AM:

To add to what Pat has to say. The sputtering should be taking place at about 10-2 Torr. The gauges that can be used reliably at this pressure are the capacitance manometer gauge, the spinning rotor gauge or since you are using a plasma the optical emission spectrometer. The ion gauge collects ions that are produced in the ion guage, when sputtering there is a plasma and ions are produced elsewhere thus the ion gauge is not accurate when a plasma is present. I addition it is not very good in the sputtering pressure range. If the pressure is too low there will be no plasma formed. If the pressure is too high then you also will not get any sputter deposition. Don Mattox

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