In Reply to: cvc 601 sputtering machine posted by Abhiram Govindaraju on 12/08/02 at 7:39 AM:
This is a very strange problem. The ion gauge, which is used only to measure the vacuum level in the chamber should be turned off while sputtering as the pressuse is generally too high for it to operate. The ion gauge does not take part in the sputtering process.
I would have to say that you may not be operating the system properly or that the system is not working properly.
When you have reached to pump down vacuum that you want, you should turn off the ion gauge, backfill to the desired pressure with Argon, and then turn on you sputtering supply. If this is not working for you, there is a problem with the system.
Please get back to me with further information.