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Subject: cvc 601 sputtering machine

Date: 12/08/02 at 7:39 AM
Posted by: Abhiram Govindaraju
E-mail: ram_glg@rediffmail.com
Message Posted:

i have this cvc 601 sputtering system, i am facing a problem now with this machine, i would be thankful if some one could pull me out of this,all i want to know is whether i should turn on the high vacuum ion gauge during sputtering. i know that the ion gauge has to be turned on to reach high vacuum of say x10-7 torr,but should i keep it running even during the sputtering.
if i turn it off i don't see any coating done on the wafers.
the ion gauge has to send out electrons to the vacuum chamber so that it can ionize the gas molecules in the chamber.

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