[ List Subjects ][ Current Board ][ Post Message ]
Subject: Re: Sputtering Al
[ View Followups ][ Post Followup ]
Date: 11/15/02 at 10:16 PM
Posted by: Pat McMahon
In Reply to: Re: Sputtering Al posted by moshin on 11/15/02 at 1:08 PM:
The fact that you have outgassed the system and still have problems with your coatings seems to indicate that Don is correct and you have to introduce some additional energy into the depositing films. Substrate biasing is one way to do this but a simplier way might be to heat the substrates during deposition. Also alternate means of deposition such as ion plating might be considered.
As a first step, I would see if increased substrate temperature helps or not and if not proceed to other methods.
Post a Follow-up: