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Subject: Re: Sputtering Al
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Date: 11/15/02 at 1:08 PM
Posted by: moshin
In Reply to: Re: Sputtering Al posted by pat McMahon on 11/14/02 at 10:38 PM:
Dear Sir When the problem arised I heated the chamber to 60C for aroung 12-15 hours to remove any water vapour present and also I checked using SEM that there is no differnce between the thin and the thick samples ie the percentage of oxygen.
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