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Subject: Sputtering Al

Date: 11/14/02 at 2:04 PM
Posted by: moshin
E-mail: moshinmoh@hotmail.com
Message Posted:

Dear all I have some problem with sputtering Al, Cu, Ag. whem they are thin ie around 700-800nm or below then they look mettalic once I go beyond this thickness they become milky I am using the same conditions to coat the thin and the thick layers, Its a RF sputtering with Ar flow of 80SCCM. and chamber pressure around 3mt.ThanksMoshin

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