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Subject: Re: Backflow of diffusing pump oil into vaccuum deposition chamber

Date: 06/12/02 at 10:13 PM
Posted by: Pat McMahon
E-mail: film.vac@verizon.net
Message Posted:

In Reply to: Backflow of diffusing pump oil into vaccuum deposition chamber posted by C.S.Lee on 06/12/02 at 4:20 AM:

There are two main reasons for diffusion pump back streaming.

1. Loss of water cooling of the diffusion pump.

2. Not enough vacuum in the diffusion pump foreline.

Check the water flow in the diffusion pump and insert a T/C gauge in the foreline to monitor the vacuum level.

Best of luck.

Pat


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