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Subject: How to clean well the stainless steel vacuum chamber?
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Date: 11/12/02 at 1:20 AM
Posted by: Hyunbin Kim
I'm working with pulsed laser deposition system to grow bioceramic coatings. The chamber have been also used for deposition with graphite, ZnS etc. How can I clean the stainless steel chamber well? I used 69% nitric acid to clean inside the chamber and released with deionized water. After that, vacuum got much worse and it's too hard to go down to 10^-5. Please give me a solution for bad vacuum and a advice for cleaing vacuum chamber made of stainless steel.
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