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Subject: Re: SiO evaporation

Date: 11/07/02 at 9:36 AM
Posted by: Wojtek
E-mail: wfalkowski@jzo.com.pl
Message Posted:

In Reply to: SiO evaporation posted by Nathan Ritchie on 11/07/02 at 6:29 AM:

"Silicon monoxide can be evaporated from boats of Molybdenum, Tungsten or Tantalum, from Tungsten-filaments and with the electron bean (eb). To evaporate Silicon monoxide powder or fine-grained Silicon monoxide granules boats with cover should be used. The evaporation temperature (sublimation) is 1200-1600C.

The optical properties of layers manufactured by evaporating Silicon monoxide depend very much on the evaporation conditions used. Layers made of Silicon monoxide adhere very well to substrates like glass, fused silica etc. They show excellent resistance to chemical and mechanical influences.

SiO-Layers are produced by evaporation in high vacuum at pressures below 2x10-5 mbar and with high evaporation rate, e.g. 50nm/min. These layers are yellow to brown in color depending on the thickness." - from MERCK.


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