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Date: 06/12/02 at 4:20 AM
Posted by: C.S.Lee
E-mail: chusang@unitel.co.kr

During the operation of vaccuum deposition machine for Al deposition on glass,the oil in diffusing pump came into chamber.
Would you please let me know the possible reasons and appropriate treatments to be done. We are now in very urgent situation because the production line is stopped .

Follow Ups:

  Re: Backflow of diffusing pump oil into vaccuum deposition chamber Garry Williams   Posted at: 06/17/02 (1)

  Re: Backflow of diffusing pump oil into vaccuum deposition chamber Donald Mattox   Posted at: 06/19/02 (0)

  Re: Backflow of diffusing pump oil into vaccuum deposition chamber Pat McMahon   Posted at: 06/12/02 (1)

  Re: Backflow of diffusing pump oil into vaccuum deposition chamber dan feigenbaum   Posted at: 06/17/02 (0)

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