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Subject: Backflow of diffusing pump oil into vaccuum deposition chamber

Date: 06/12/02 at 4:20 AM
Posted by: C.S.Lee
E-mail: chusang@unitel.co.kr
Message Posted:

During the operation of vaccuum deposition machine for Al deposition on glass,the oil in diffusing pump came into chamber.
Would you please let me know the possible reasons and appropriate treatments to be done. We are now in very urgent situation because the production line is stopped .

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