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Subject: Re: Need help with SiO2 sputtering

Date: 11/03/02 at 6:50 PM
Posted by: Rob Belan
E-mail: rbelan@angstromsciences.com
Message Posted:

In Reply to: Need help with SiO2 sputtering posted by Tony Bollinger on 11/03/02 at 4:10 PM:


If you go thicker with the film, say 800nm, does the coating get smoother? I think that an 80nm coating is pretty thin and might be rough no matter how it is done. If it does not get smoother and more uniform with a thicker coating, then you can look at process parameters such as through distance, power, temperature and such.

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