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Subject: Darkness control of Cr coated glass

Date: 06/12/02 at 2:30 AM
Posted by: Lee,Choong Sang
E-mail: chusang@unitel.co.kr
Message Posted:

I make Cr coated outside mirror of vehicules by sputtering.
The coated surface is too dark.Please give your kind assistance to control the darkness of coated glass.
Followings are the process conditions of our sputtering machine.
-vaccuum degree:6.0EXP.-5 Torr
-Target material: pure Cr.
-Plasma:pure Ar gas
-D.C.plasma power: 480V,13A
-Vaccuum pumps:Oil diffusion pump,Booster pump and Rotary pump.
-cooling water temp. of cold trap of D.F.pump:32 degree C
-sputtering time in chamber:15~20 min.

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